Ultra High Speed Temperature Control
Sampling 0.025 sec
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High speed feedback control of 40 samples per second.
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The SRX is a digital PID controller with a high speed sampling time of 25 ms (0.025 sec) with high-resolution thermocouple, RTD and current voltage input, supplied with parameters settable in 1/100 sec. Application in RTP (Rapid Thermal Process), RTA (Rapid Thermal Anneal) and pulse heat temperature control of flip chip bonders in semiconductor manufacturing can be controlled by the SRX. The high speed sampling function also makes it suitable for additional application requirements such as pressure and flow rate.

Semiconductor
 Module type controller SRX
Module type High speed digital controller SRX
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Star 01Features
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Star1Ultra High Speed Sampling 0.025 sec Star5Space-saving, simple-wiring
Star2Two Channels in One Module Star6High Accuracy ±(0.1% of PV)
Star3High Resolution Star7Communications
Star4Ramp / Soak Program Control
To maximize the performance of the high speed sampling function, other devices for temperature control, such as sensors, actuator, and heat source, should also be with fast response.
Sensors and actuators (SSR, power controllers) suitable for the SRX are available from RKC. Please contact RKC for details.
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